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FLOW METER, 50LPM, 0.2%, 10BAR


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Technical Datasheet:
SFM6000D-50SLM   Datasheet
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Product Range Selector (CMOSens SFM6000D Series)

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Product Overview

SFM6000D-50SLM is a digital mass flow controller. This measures gas mass flow by the calorimetric principle based on heat transfer. A heater element on a thermally insulated membrane and two thermopiles up-stream and downstream are integrated on a single silicon chip. In the presence of gas flow, the temperature distribution up and downstream is disturbed. This asymmetry is then measured. The measurement area as well as the A/D converter and further signal processing are based on a single chip using CMOS standard processes. Moreover, the same chip also takes over the function of a microprocessor in a standard mass flow controller, directly regulating the valve.
  • 50 - 0.1slm flow range
  • Disruptive concept combining plastic body and highly integrated electronics
  • Small form factor and low weight
  • High accuracy/repeatability (2% / 0.2% of set point)
  • Wide control range (500:1), ultra-fast settling time (100ms)
  • RS485 and I²C digital interface
  • Exchangeable 6mm push-in and down mount connectors
  • NIST traceable calibration
  • No drift and no re-calibration required in the field
  • NIST traceable calibration

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CMOSens SFM6000D Series

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Technical Documents (5)

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