SFM5500-0.5SLM

SFM5500 series high pressure mass flow meter represent the culmination of Sensirion’s excellent 20-year track record in precision control of gas flow. The sensor is based on microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS technology. This allowed us to build a radical mass flow controller/meter with best-in-class performance and excellent reliability, which unlike most other devices on market, does not drift and does not require in-service re-calibration. Thanks to exceptionally high control range enabled by CMOSens® MEMS flow sensor, SFM5500 series can cover multiple flow ranges of a traditional mass flow controller/meter in a single device. Coupled with multi-gas calibration and exchangeable fittings, this series is first mass flow meter on market available as standard off-the-shelf products suitable for applications in medical, analytical and industrial sectors, bioreactors, chemical, plastics and glass industry, semiconductors.

• Flow rates up to 500sccm / 0.5slm
• Suitable for applications where best accuracy, highest speed and widest dynamic range are needed
• Excellent accuracy and repeatability (0.8% / 0.1% of setpoint respectively)
• Very wide control range (<lt/>0.1% - 100% full scale), ultra-fast settling time (<lt/>100ms)
• G ¼″ flange compatible with a broad range of connectors: e.g. Swagelok, Legris, Festo
• Calibrated for multiple gases (Air, N2, O2, H2, He, CH4, N2O, Ar, CO2)
• Digital interface with temperature-compensated output, ultra-fast settling time (<lt/>100ms)
• Pressure resistance up to 10 bar, mean time between failures (MTBF) 169 years
• No drift and no re-calibration required in the field, NIST-traceable calibration
• EK-F5x evaluation kit for quick and easy testing